MEMS and Nanotechnology(Departmental Elective - III) — Summer 2018

Describe the various domain applications of MEMS devices.

Give at least three distinct advantages of miniaturization of machines and device.

Give the comparison between Microelectronics and Microsystems.

Determine the shift of natural frequency of a fixed-end beam made of silicon, with geometry and dimensions shown below when subjected to a longitudinal stress at 187 MPa. The dimensions of the beam are width b = 40 x 10-6 m, depth (thickness) h = 6 x 10-6 m, length L = 600 x 10-6 m. The following properties are applicable to silicon beam:1 Young’s modulus E = 190,000 MPa Mass density ρ = 2300 kg/m3

What are the principal application of microsensors, actuators and fluidics?

Evaluate the effect of creep in MEMS devices diminishes at higher values of temperature.

Estimate the damping coefficient in a force balanced micro accelerometer, as illustrated in Fig. 1, for air and for silicone oil as the damping fluid. Assume that the micro accelerometer operates at 20°C. Fig .1

Discuss the tools available for characterizing nanostructures.

Differentiate between Ion Implantation and Diffusion process.

Explain the working and applications of different types of Micro accelerometers.

Explain the Czochralski method for producing single-crystal silicon.

Differentiate between Squeeze film and damping in shear.

Explain the Photolithography process in detail with a suitable example.

Discuss the major technical issues to be handled in BIOMEMS products.

What is etching? Give the types of it.

Explain Chemical Vapor Deposition process.

Determine the required electric voltage for ejecting a droplet of ink from an inkjet printer head (shown in below figure) using PZT piezoelectric crystal as a pumping mechanism. The ejected ink will have a resolution of 300 dpi (dots per inch). The ink droplet is assumed to produce a dot with a film thickness of 1 μm on the paper. The geometry and dimension of the printer head is illustrated below. Assume that the ink droplet takes a shape of a sphere and the inkwell is always re-filled after ejection. Fig .22

Explain working principle of Chemical Vapor Deposition process.

Explain scaling in fluid mechanics.

Explain the role of Finite Element Analysis in the Design of MEMS structures.

Differentiate between SEM and TEM.

What are the types and possible applications of carbon nanotubes?

“At the nanoscale, the job of "seeing" is done by molecular recognition.” Explain.

Justify: At the nanometer scale, properties become size dependent.

Explain the use of carbon nanotubes as nano bio sensors.