MEMS and Nano Technology — Winter 2021

What is MEMS stand for? How does it work in Nanotechnology?

What are the tools available to make the nanostructures? Explain any one.

Describe the various domain applications of MEMS devices.

Justify: At the nanometer scale, properties become size dependent.

Give the comparison between Microelectronics and Microsystems

With a neat diagram explain the working of an Intelligent Microsystems.

Explain the Czochralski method for producing single-crystal silicon.

In comb drive actuators used in micro grippers, normal plate electrode technique is better suited as compared to sliding plate one”. Evaluate.

Explain difference between Squeeze film and damping in shear.

How is the silicon ingot produced? Explain the process with a neat sketch.

What are the types of carbon nanotubes?

Explain creep is a temperature independent phenomenon.

Using a nest sketch explain the construction and working of a MEMS Pressure sensor.

Explain working principle of Chemical Vapor Deposition process.

Why Electromagnetic force is not used for actuation of MEMS devices?

What are the qualities desired for a substrate to be considered in Micro fabrication? Explain with an example.

What is Etching explain?

Discuss the significance of scaling laws in Miniaturization with reference to Geometry and Rigid body dynamics.

Discuss various substrate materials and justify the use of silicon as an ideal substrate material.

Explain Spectroscopy.

Classify the techniques used to make nanostructures. Explain any one.

Describe the methods available for making nanostructures. Differentiate between SEM and TEM.1

Why traditional manufacturing techniques cannot be used at micro level?

Write in brief: Ion Implantation process

Explain the merits and demerits of micro actuation techniques used in MEMS devices.